-
Diffraction-based overlay metrology using angular-multiplexed acquisition of dark-field digital holograms Article
Optics Express, 28(25), 37419-37435.C. Messinis (Christos), T.T.M. van Schaijk (Theodorus), N. Pandey (Nitesh), V.T. Tenner (Vasco), S. Witte (Stefan), J.F. de Boer (Johannes) and A. den Boef (Arie)
November 2020
-
Metal oxo clusters: molecular design for extreme ultraviolet lithography Dissertation
EUV Photoresists-Former GroupNovember 2020 -
Shape‐Preserving Chemical Conversion of Architected Nanocomposites Article
Adv.Mater.H.C. Hendrikse (Hans), A. van der Weijden (Arno), M. Ronda‐Lloret (Maria), T. Yang (Ting), R. Bliem (Roland), R.N. Shiju (Raveendran), M. van Hecke (Martin), L. Li (Ling) and W.L. Noorduin (Willem)
November 2020 -
Charge-state-resolved spectroscopy of multiply-charged tin ions Dissertation
EUV Plasma ProcessesNovember 2020 -
Single-collision scattering of keV-energy Kr ions off a polycrystalline Cu surface Article
Nucl. Instrum. Methods. Phys. Res., Sect B, 58-63.S. Rai (Subam), K.I. Bijlsma (Klaas), S. Koeleman, Tjepkema (O.G.), A.W. Noordam, H.T. Jonkman, O.O. Versolato (Oscar) and R. Hoekstra (Ronnie)
November 2020
-
High-resolution microscopy through optically opaque media using ultrafast photoacoustics Article
Opt. Express, 28(23), 33937-33947.A. Antoncecchi (Alessandro), H. Zhang (Hao), S. Edward (Stephen), V. Verrina (Vanessa), P.C.M. Planken (Paul) and S. Witte (Stefan)
October 2020 -
Role of scattering by surface roughness in the photoacoustic detection of hidden micro-structures Article
Appl.Opt., 59(30), 9499-9509.V. Verrina (Vanessa), S. Edward (Stephen), H. Zhang (Hao), A. Antoncecchi (Alessandro), S. Witte (Stefan) and P.C.M. Planken (Paul)
October 2020
-
Unravelling the effect of fluorinated ligands in hybrid EUV photoresists by X-ray spectroscopy Article
J.Mater.Chem.CL. Wu (Lianjia), I. Bespalov (Ivan), K. Witte (Katharina), O. Lugier (Oliver), J. Haitjema (Jarich), M. Vockenhuber (Michaela), Y. Ekinci (Yasin), B. Watts (Benjamin), A.M. Brouwer (Albert) and S. Castellanos (Sonia)
October 2020