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Single-collision scattering of keV-energy Kr ions off a polycrystalline Cu surface Article
Nucl. Instrum. Methods. Phys. Res., Sect B, 58-63.S. Rai (Subam), K.I. Bijlsma (Klaas), S. Koeleman, Tjepkema (O.G.), A.W. Noordam, H.T. Jonkman, O.O. Versolato (Oscar) and R. Hoekstra (Ronnie)
November 2020 -
Uncertainty estimation and design optimization of 2D diffraction-based overlay metrology targets Article
ACS PhotonicsR. Röhrich (Ruslan), G. Oliveri (Giorgio), S. Kovaios (Stefanos), V.T. Tenner (Vasco), A. den Boef (Arie), J.T.B. Overvelde (Johannes) and A.F. Koenderink (Femius)
August 2020
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EUV spectroscopy of Sn5-Sn10+ions in an electron beam ion trap and laser-produced plasmas Article
J. Phys. B: At. At. Mol. Opt. Phys., 53(19), 195001: 1-11.Z. Bouza (Zoi), J. Scheers (Joris), A.N. Ryabtsev (Alexander), R. Schupp (Ruben), L. Behnke (Lars), C. Shah (Chintan), J. Sheil (John), M. Bayraktar (Muharrem), J.R. Crespo López-Urrutia, W.M.G. Ubachs (Wim), et al. R. Hoekstra (Ronnie) and O.O. Versolato (Oscar)
August 2020
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Photoacoustic detection of low duty cycle gratings through optically opaque layers Article
Appl.Phys.Lett., 117(5), 051104: 1-6.V. Verrina (Vanessa), S. Edward (Stephen), H. Zhang (Hao), S. Witte (Stefan) and P.C.M. Planken (Paul)
August 2020
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Laser-induced ultrasonics for detection of low-amplitude grating through metal layers with finite roughness Article
Optics Express, 28(16), 23374-23387.S. Edward (Stephen), H. Zhang (Hao), S. Witte (Stefan) and P.C.M. Planken (Paul)
July 2020
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Time- and space-resolved optical Stark spectroscopy in the afterglow of laser-produced tin-droplet plasma Article
Phys.Rev.E, 102(1), 013204: 1-9.J. Scheers (Joris), R. Schupp (Ruben), R.A. Meijer (Randy), W.M.G. Ubachs (Wim), R. Hoekstra (Ronnie) and O.O. Versolato (Oscar)
July 2020
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Detection of hidden gratings through multilayer nanostructures using light and sound Article
Phys. Rev. Appl., 14(1), 014015-1-16.S. Edward (Stephen), H. Zhang (Hao), I. Setija (Irwan), V. Verrina (Vanessa), A. Antoncecchi (Alessandro), S. Witte (Stefan) and P.C.M. Planken (Paul)
July 2020
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XUV Induced Bleaching of a Tin Oxo Cage Photoresist Studied by High Harmonic Absorption Spectroscopy Article
J. Photopolymer. Sci.Tec., 33(2), 145-151.N. Sadegh (Najmeh), M. van der Geest (Maarten), J. Haitjema (Jarich), F. Campi (Filippo), S. Castellanos (Sonia), P.M. Kraus (Peter) and A.M. Brouwer (Albert)
July 2020