ARCNL Institutional Repository: ARCNL Institutional Repository

Metal oxo clusters: molecular design for extreme ultraviolet lithography Dissertation

EUV Photoresists-Former Group

L. Wu (Lianjia)

November 2020
Shape‐Preserving Chemical Conversion of Architected Nanocomposites Article

Adv.Mater.

H.C. Hendrikse (Hans), A. van der Weijden (Arno), M. Ronda‐Lloret (Maria), T. Yang (Ting), R. Bliem (Roland), R.N. Shiju (Raveendran), M. van Hecke (Martin), L. Li (Ling) and W.L. Noorduin (Willem)

November 2020
High-resolution microscopy through optically opaque media using ultrafast photoacoustics Article

Opt. Express, 28(23), 33937-33947.

A. Antoncecchi (Alessandro), H. Zhang (Hao), S. Edward (Stephen), V. Verrina (Vanessa), P.C.M. Planken (Paul) and S. Witte (Stefan)

October 2020
Charge-state-resolved spectroscopy of multiply-charged tin ions Dissertation

EUV Plasma Processes

J. Scheers (Joris)

November 2020
Probing the ultrafast electron and lattice dynamics of gold using femtosecond mid-infrared pulses Article

Physical Review B, 102(13), 134301: 1-8.

H.J. Sielcken (Harmen) and H.J. Bakker (Huib)

October 2020
Unravelling the effect of fluorinated ligands in hybrid EUV photoresists by X-ray spectroscopy Article

J.Mater.Chem.C

L. Wu (Lianjia), I. Bespalov (Ivan), K. Witte (Katharina), O. Lugier (Oliver), J. Haitjema (Jarich), M. Vockenhuber (Michaela), Y. Ekinci (Yasin), B. Watts (Benjamin), A.M. Brouwer (Albert) and S. Castellanos (Sonia)

October 2020
Mixed-ligand zinc-oxoclusters: efficient chemistry for high resolution nanolithography Article

J.Mater.Chem.C

N. Thakur (Neha), R. Bliem (Roland), I. Mochi (Iacopo), M. Vockenhuber (Michaela), Y. Ekinci (Yasin) and S. Castellanos (Sonia)

October 2020
Role of scattering by surface roughness in the photoacoustic detection of hidden micro-structures Article

Appl.Opt., 59(30), 9499-9509.

V. Verrina (Vanessa), S. Edward (Stephen), H. Zhang (Hao), A. Antoncecchi (Alessandro), S. Witte (Stefan) and P.C.M. Planken (Paul)

October 2020
Single-collision scattering of keV-energy Kr ions off a polycrystalline Cu surface Article

Nucl. Instrum. Methods. Phys. Res., Sect B, 58-63.

S. Rai (Subam), K.I. Bijlsma (Klaas), S. Koeleman, Tjepkema (O.G.), A.W. Noordam, H.T. Jonkman, O.O. Versolato (Oscar) and R. Hoekstra (Ronnie)

November 2020
Attosecond Time-Domain Measurement of Core-Level-Exciton Decay in Magnesium Oxide Article

Phys. Rev. Lett., 124(20), 207401: 1-6.

R. Géneaux (Romain), C.J. Kaplan (Christopher), L. Yue (Lun), A.D. Ross (Andrew), E. Bækhøj (Jens), P.M. Kraus (Peter), H.-T. Chang (Hung-Tzu), A. Guggenmos (Alexander), M.-Y. Huang (Mi-Ying), M. Zürch (Michael), et al. S.R. Leone (Stephen)

May 2020
Efficient table-top dual-wavelength beamline for ultrafast transient absorption spectroscopy in the soft X-ray region Article

Sci. Rep, 10(1), 5733: 1-9.

L. Barreau (Lou), A.D. Ross (Andrew), S. Garg (Samay), P.M. Kraus (Peter), D.M. Neumark (Daniel) and S.R. Leone (Stephen)

April 2020
Uncertainty estimation and design optimization of 2D diffraction-based overlay metrology targets Article

ACS Photonics

R. Röhrich (Ruslan), G. Oliveri (Giorgio), S. Kovaios (Stefanos), V.T. Tenner (Vasco), A. den Boef (Arie), J.T.B. Overvelde (Johannes) and A.F. Koenderink (Femius)

August 2020
Photoacoustic detection of low duty cycle gratings through optically opaque layers Article

Appl.Phys.Lett., 117(5), 051104: 1-6.

V. Verrina (Vanessa), S. Edward (Stephen), H. Zhang (Hao), S. Witte (Stefan) and P.C.M. Planken (Paul)

August 2020
Laser-induced ultrasonics for detection of low-amplitude grating through metal layers with finite roughness Article

Optics Express, 28(16), 23374-23387.

S. Edward (Stephen), H. Zhang (Hao), S. Witte (Stefan) and P.C.M. Planken (Paul)

July 2020
EUV spectroscopy of Sn5-Sn10+ions in an electron beam ion trap and laser-produced plasmas Article

J. Phys. B: At. At. Mol. Opt. Phys., 53(19), 195001: 1-11.

Z. Bouza (Zoi), J. Scheers (Joris), A.N. Ryabtsev (Alexander), R. Schupp (Ruben), L. Behnke (Lars), C. Shah (Chintan), J. Sheil (John), M. Bayraktar (Muharrem), J.R. Crespo López-Urrutia, W.M.G. Ubachs (Wim), et al. O.O. Versolato (Oscar)

August 2020
Impact of the synthetic conditions on the morphology and crystallinity of FDMOF-1(Cu) thin films. Article

Cryst. Growth Des., 20(8), 5302-5309.

O. Lugier (Oliver), U. Pokharel (Unnati) and Castellanos, Sonia

June 2020
XUV Induced Bleaching of a Tin Oxo Cage Photoresist Studied by High Harmonic Absorption Spectroscopy Article

J. Photopolymer. Sci.Tec., 33(2), 145-151.

N. Sadegh (Najmeh), M. van der Geest (Maarten), J. Haitjema (Jarich), F. Campi (Filippo), S. Castellanos (Sonia), P.M. Kraus (Peter) and A.M. Brouwer (Albert)

July 2020
EUV spectroscopy of highly charged Sn13+−Sn15+ ions in an electron-beam ion trap Article

Phys. Rev. A, 101(6), 062511: 1-11.

J. Scheers (Joris), C. Shah (Chintan), A.N. Ryabtsev (Alexander), H. Bekker, F. Torretti (Francesco), J. Sheil (John), D.A. Czapski, J.C. Berengut, W.M.G. Ubachs (Wim), J.R. Crespo López-Urrutia, et al. O.O. Versolato (Oscar)

June 2020
Laser-induced periodic surface structures: Arbitrary angles of incidence and polarization states Article

Phys.Rev.B, 101(24), 245430: 1-15.

H. Zhang (Hao), J.-P. Colombier (Jean-Philippe) and S. Witte (Stefan)

June 2020
Time- and space-resolved optical Stark spectroscopy in the afterglow of laser-produced tin-droplet plasma Article

Phys.Rev.E, 102(1), 013204: 1-9.

J. Scheers (Joris), R. Schupp (Ruben), R.A. Meijer (Randy), W.M.G. Ubachs (Wim), R. Hoekstra (Ronnie) and O.O. Versolato (Oscar)

July 2020
Detection of hidden gratings through multilayer nanostructures using light and sound Article

Phys. Rev. Appl., 14(1), 014015-1-16.

S. Edward (Stephen), H. Zhang (Hao), I. Setija (Irwan), V. Verrina (Vanessa), A. Antoncecchi (Alessandro), S. Witte (Stefan) and P.C.M. Planken (Paul)

July 2020
Exciting tin-oxo cages: light-induced chemistry for nanopatterning Dissertation

Nanophotochemistry

J. Haitjema (Jarich)

June 2020
Endo-microscopy beyond the Abbe and Nyquist limits Article

Light : Sci. Appl., 9(1), 81: 1-12.

L.V. Amitonova (Lyubov) and J.F. de Boer (Johannes)

May 2020
Divergence Control of High-Harmonic Generation Article

Phys. Rev. Applied, 13(5), 054029: 1-9.

S.D.C. Roscam Abbing (Sylvianne), F. Campi (Filippo), F.S. Sajjadian (Faegheh), N. Lin (Nan), P. Smorenburg (Peter) and P.M. Kraus (Peter)

May 2020
Detection of hidden gratings using light and sound Dissertation

Light-Matter Interaction

S. Edward (Stephen)

June 2020
Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography Article

Nature Commun., 11(1), 2334: 1-8.

F. Torretti (Francesco), J. Sheil (John), R. Schupp (Ruben), M.M. Basko (Mikhail), M. Bayraktar (Muharrem), R.A. Meijer (Randy), S. Witte (Stefan), W.M.G. Ubachs (Wim), R. Hoekstra (Ronnie), O.O. Versolato (Oscar), et al. J. Colgan

May 2020
Phase retrieval algorithms for lensless imaging using diffractive shearing interferometry Article

J. Opt. Soc. Am. A, 37(6), 914-924.

A.P. Konijnenberg (Sander), A.C.C. de Beurs (Anne), G.S.M. Jansen (Matthijs), H.P. Urbach, S. Witte (Stefan) and W.M.J. Coene

May 2020
Fourier ptychography: current applications and future promises Article

Opt. Express, 28(7), 9603-9630.

P.C. Konda (Pavan Chandra), L. Loetgering (Lars), K.C. Zhou (Kevin), S. Xu (Shiqi), A.R. Harvey (Andrew) and R. Horstmeyer (Roarke)

March 2020
Adsorbate-induced structural evolution changes the mechanism of CO oxidation on a Rh/Fe3O4(001) model catalyst Article

Nanoscale, 12(10), 5866-5875.

Z. Jakub (Zdenek), J. Hulva (Jan), P.T.P. Ryan (Paul), D.A. Duncan (David), D.J. Payne (David), R. Bliem (Roland), M. Ulreich (Manuel), P. Hofegger (Patrick), F. Kraushofer (Florian), M. Meier (Matthias), et al. G.S. Parkinson (Gareth)

January 2020
Electrochemical Polarization Dependence of the Elastic and Electrostatic Driving Forces to Aliovalent Dopant Segregation on LaMnO3 Article

JACS, 142(7), 3548-3563.

D. Kim (Dongha), R. Bliem (Roland), F. Hess (Franziska), J.-J. Gallet (Jean-Jacques) and B. Yildiz (Bilge)

January 2020
Drop fragmentation by laser-pulse impact Article

J. Fluid Mech., A7: 1-37.

A.L. Klein (Alexander), D. Kurilovich (Dmitry), H. Lhuissier (Henri), O.O. Versolato (Oscar), D. Lohse (Detlef), E. Villermaux (Emmanuel) and H. Gelderblom (Hanneke)

April 2020
Universal Direct Pattering of Colloidal Quantum Dots by (Extreme) Ultraviolet and Electron Beam Lithography Article

Nanoscale, 12(20), 11306-11316.

C. Dieleman (Christian), Weiyi Ding (W.), L. Wu (Lianjia), N. Thakur (Neha), I. Bespalov (Ivan), B. Daiber (Benjamin), Y. Ekinci (Yasin), S. Castellanos (Sonia) and B. Ehrler (Bruno)

April 2020
Photon-induced Fragmentation of Zinc-based Oxoclusters for EUV Lithography Applications Article

J. Photopolym. Sci. Tec., 33(2), 153-158.

N. Thakur (Neha), A. Giuliani (Alexandre), L. Nahon (Laurent) and S. Castellanos (Sonia)

July 2020
Extreme Ultraviolet Photoelectron Spectroscopy on Fluorinated Monolayers: towards Nanolithography on Monolayers Article

J. Photopolym. Sci. Tec., 33(2), 229-234.

O. Lugier (Oliver), A. Troglia (Alessandro), N. Sadegh (Najmeh), L. van Kessel (Luc), R. Bliem (Roland), N. Mahne (Nicola), S. Nannarone (Stefano) and S. Castellanos (Sonia)

July 2020
Impact of coherence length on the field of view in dark-field holographic microscopy for semiconductor metrology: theoretical and experimental comparisons Article

Appl.Opt., 59(11), 3498-3507.

C. Messinis (Christos), V.T. Tenner (Vasco), J.F. de Boer (Johannes), S. Witte (Stefan) and A. den Boef (Arie)

April 2020
Femtosecond time-resolved pump-probe measurements on percolating gold in the ablation regime Article

Opt. Express, 28(8), 12093-12107.

G. de Haan (Guido), J. Hernandez-Rueda (Javier) and P.C.M. Planken (Paul)

April 2020
zPIE: an autofocusing algorithm for ptychography Article

Opt. Lett., 45(7), 2030-2033.

L. Loetgering (Lars), M. Du (Mengqi), K.S.E. Eikema (Kjeld) and S. Witte (Stefan)

March 2020
Ageing of Polymer Frictional Interfaces: The Role of Quantity and Quality of Contact Article

ACS Appl. Mater. Interfaces, 12(8), 9890-9895.

D. Petrova (Dina), D.K. Sharma, M. Vacha, D. Bonn (Daniel), A.M. Brouwer (Albert) and B. Weber (Bart)

February 2020
Sensitivity analysis of Raman endoscopy with and without wavefront shaping Article

Opt. Express, 28(3), 3779-3788.

L.V. Amitonova (Lyubov) and J.F. de Boer (Johannes)

January 2020
Quantum key establishment via a multimode fiber Article

Optics Express, 28(5), 5965-5981.

L.V. Amitonova (Lyubov), T.B.H. Tentrup (Tristan), I.M. Vellekoop (Ivo) and P.W.H. Pinkse (Pepijn)

February 2020
The Key Role of Very-Low-Energy-Electrons in Tin-based Molecular Resists for Extreme Ultraviolet Nanolithography Article

ACS Appl. Mater. Interfaces, 12(8), 9881-0889.

I. Bespalov (Ivan), Y. Zhang (Yu), J. Haitjema (Jarich), R.M. Tromp (Rudolf), S.J. van der Molen (Sense Jan), A.M. Brouwer (Albert), J. Jobst (Johannes) and S. Castellanos (Sonia)

February 2020
Extreme ultraviolet lensless imaging without object support through rotational diversity in diffractive shearing interferometry Article

Opt. Express, 28(4), 5257-5266.

A.C.C. de Beurs (Anne), X. Liu, G.S.M. Jansen (Matthijs), A.P. Konijnenberg (Sander), W.M.J. Coene, K.S.E. Eikema (Kjeld) and S. Witte (Stefan)

February 2020
Response to Comment on “On the Origin of Frictional Energy Dissipation”, by B.N.J. Persson Article

Tribol Lett, 35: 1-2.

R. Hu (Renfeng), S.Yu. Krylov (Sergey) and J.W.M. Frenken (Joost)

February 2020
Measuring laser beam quality, wavefronts, and lens aberrations using ptychography Article

Opt. Express, 28(4), 5022-5034.

M. Du (Mengqi), L. Loetgering (Lars), K.S.E. Eikema (Kjeld) and S. Witte (Stefan)

February 2020
Wavelength-resolved Extreme Ultraviolet Lensless Imaging and Metrology Dissertation

EUV Generation & Imaging

G.S. Jansen (Matthijs)

January 2020
Mass loss from a stretching semitransparent sheet of liquid tin Article

Phys. Rev. Applied, 13(2), 024035: 1-10.

B. Liu (Bo), D. Kurilovich (Dmitry), H. Gelderblom (Hanneke) and O.O. Versolato (Oscar)

February 2020
Unraveling Phononic, Optoacoustic, and Mechanical Properties of Metals with Light-Driven Hypersound Article

Phys. Rev. Applied, 13(1), 014010: 1-14.

H. Zhang (Hao), A. Antoncecchi (Alessandro), S. Edward (Stephen), I. Setija (Irwan), P.C.M. Planken (Paul) and S. Witte (Stefan)

January 2020
Effect of rubidium incorporation on the optical properties and intermixing in Mo/Si multilayer mirrors for EUV lithography applications Article

Appl.Surf. Sci., 144951: 1-10.

M. Saedi (Mehdi), C. Sfiligoj (Cristina), J. Verhoeven (Jan) and J.W.M. Frenken (Joost)

March 2020
On the Origin of Frictional Energy Dissipation Article

Tribol Lett, 68(1), 8: 1-13.

R. Hu (Renfeng), S.Yu. Krylov (Sergey) and J.W.M. Frenken (Joost)

March 2020
Generation and characterization of focused helical x-ray beams Article

Sci.Adv., 6(7), eaax8836: 1-6.

L. Loetgering (Lars), M. Baluktsian (Margarita), K. Keskinbora (Kahraman), R. Horstmeyer (Roarke), T. Wilhein (Thomas), G. Schütz (Gisela), K.S.E. Eikema (Kjeld) and S. Witte (Stefan)

February 2020

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