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    Thermal Stability of Nanolayers for EUV Optics Dissertation

    Materials & Surface Science for EUV Lithography

    G. Yetik (Görsel)

    July 2023
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    High-energy parametric oscillator and amplifier pulsed light source at 2-μm Article

    Opt. Express, 31(15), 24142-24156.

    L. Behnke (Lars), E.J. Salumbides (Edcel), G. Göritz (Guido), Y. Mostafa (Yahia), D.J. Engels (Dion), W.M.G. Ubachs (Wim) and O.O. Versolato (Oscar)

    July 2023
    open access
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    RALEF-2D for Modeling Laser-Produced Plasma: Investigating Anisotropy in Plasma Expansion for Varying Laser Intensities Master Thesis

    Mardou, M. (Bijker)

    July 2023
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    Dependence of ion charge-energy emission from Nd:YAG-laser-produced plasma on laser intensity in the 0.4–40×10^10 W/cm2 range Article

    Phys. Plasmas, 30(8), 083505 : 1-10.

    L. Poirier (Lucas), A.C. Lassise (Adam), R. Hoekstra (Ronnie), J. Sheil (John) and O.O. Versolato (Oscar)

    August 2023
    open access
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    Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates Article

    Opt. Lett., 48(16), 4316-4318.

    Y. Mostafa (Yahia), Z. Bouza (Zoi), J. Byers (James), I. Babenko (Ievgeniia), W.M.G. Ubachs (Wim), O.O. Versolato (Oscar) and M. Bayraktar (Muharrem)

    August 2023
    open access
  • Robust semiconductor overlay metrology with non-uniform illumination beams using digital holographic microscopy In Proceedings

    M. Adhikary (Manashee), T.C. Cromwijk (Tamar), S. Witte (Stefan), J.F. de Boer (Johannes) and A.J. den Boef (Arie)

    August 2023
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    From atomic attrition to mild wear at multi-asperity interfaces: The wear of hard Si3N4 repeatedly contacted against soft Si Article

    Wear, 204975: 1-8.

    C. Leriche (Cyrian), C. Xiao (Chen), S.E. Franklin (Steve) and B. Weber (Bart)

    September 2023
    open access
  • Femtosecond laser induced emission of coherent terahertz pulses from ruthenium thin films Conference Paper

    L. Cruciani (Lorenzo), S. van Vliet (Stefan), A. Troglia (Alessandro), R. Bliem (Roland), N.J. van Druten and P.C.M. Planken (Paul)

    September 2023
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