Proceedings SPIE
Collection
Collection
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Absorption and exposure kinetics of photoresists at EUV In Proceedings
R. Fallica, J. Haitjema (Jarich), L. Wu (Lianjia), S. Castellanos Ortega (Sonia), A.M. Brouwer (Albert) and Y. Ekinci (Yasin)
March 2017 -
Extreme ultraviolet patterning of tin-oxo cages In Proceedings
J. Haitjema (Jarich), Y. Zhang (Yu), M. Vockenhuber (Michaela), D. Kazazis, Y. Ekinci (Yasin) and A.M. Brouwer (Albert)
March 2017
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Photochemical conversion of tin-oxo cage compounds studied using hard x-ray photoelectron spectroscopy In Proceedings
Y. Zhang (Yu), J. Haitjema (Jarich), X. Liu (Xiaomeng), F.O.L. Johansson (Fredrik), A. Lindblad (Andreas), S. Castellanos Ortega (Sonia), N. Ottosson (Niklas) and A.M. Brouwer (Albert)
March 2017
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Ti, Zr, and Hf-based molecular hybrid materials as EUV photoresists In Proceedings
S. Castellanos Ortega (Sonia), L. Wu (Lianjia), M. Baljozovic, G. Portale, D. Kazazis, M. Vockenhuber (Michaela), Y. Ekinci (Yasin) and T. Jung
March 2018