Photoreactions of Tin Oxo Cages, Model EUV Photoresists
J. Photopolym. Sci. Tec. , Volume 30 - Issue 1 p. 99- 102
Organotin oxo cage compounds have an electronic absorption band in the UV spectral range (λmax ~220 nm) associated with a σd electronic transition. Irradiation at 225 nm of thin films of these materials leads to loss of carbon, as shown by X-ray Photoelectron Spectroscopy. Photolysis of solutions of the compounds causes a decrease and slight broadening of the absorption band, consistent with replacement of the organic groups. Quantum chemical calculations support the breaking of the tin-carbon bonds as the primary process, both in electronically excited states and in oxidized states that can be expected to be the result of EUV photoionization.
|Technical Association of Photopolymers, Japan|
|J. Photopolym. Sci. Tec.|
Haitjema, J, Zhang, Y, Ottosson, N, & Brouwer, A.M. (2017). Photoreactions of Tin Oxo Cages, Model EUV Photoresists. J. Photopolym. Sci. Tec., 30(1), 99–102. doi:10.2494/photopolymer.30.99