We demonstrate a tilt angle self-calibration technique for reflection mode ptychography. Experiments show accurate angle retrieval and improved image reconstruction, with spatially structured beams outperforming beams with smooth profiles

OSA Technical Digest (Optical Society of America)
EUV Generation & Imaging

de Beurs, A., Loetgering, L., Herczog, M., Eikema, K., & Witte, S. (2021). aPIE: Angle calibration algorithm for reflection ptychography. In OSA Imaging and Applied Optics Congress 2021 (3D, COSI, DH, ISA, pcAOP), paper CW6B.4. doi:10.1364/cosi.2021.cw6b.4