We present a method to calibrate and correct lens aberrations in dark-field Digital Holographic Microscope (df-DHM). In this method a gold nanoparticle is used to measure the point-spread function (PSF) of the df-DHM.

OSA Technical Digest (Optical Society of America)
EUV Generation & Imaging

Messinis, C., van Schaijk, T., Pandey, N., Koolen, A., de Boer, J., Witte, S., & den Boef, A. (2021). Lens Aberration Calibration and Correction with Plasmonic Nanoparticles in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology. In Computational Optical Sensing and Imaging 2021 (COSI), Part of OSA Imaging and Applied Optics Congress 2021, paper CF2E.7. doi:10.1364/cosi.2021.cf2e.7