Parallel Acquisition of Multiple Images Using Coherence Gating in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology

Messinis, Christos; van Schaijk, Theodorus; Tenner, Vasco; de Boer, Johannes; Witte, Stefan; den Boef, Arie

doi:10.1364/cosi.2020.cf4c.6

C. Messinis (Christos), T.T.M. van Schaijk (Theodorus), V.T. Tenner (Vasco), J.F. de Boer (Johannes), S. Witte (Stefan) and A.J. den Boef (Arie)

2020-06-26

Parallel Acquisition of Multiple Images Using Coherence Gating in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology

We present an Off-Axis dark-field digital holographic microscope capable of parallel acquisition of multiple holograms. With this microscope we aim to measure overlay (OV) with sub-nanometer precision and milli-second acquisition times over large wavelength range.

Additional Metadata
Publisher	OSA Technical Digest (Optical Society of America)
Persistent URL	doi.org/10.1364/cosi.2020.cf4c.6
Organisation	Computational Imaging
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Messinis, C., van Schaijk, T., Tenner, V., de Boer, J., Witte, S., & den Boef, A. (2020). Parallel Acquisition of Multiple Images Using Coherence Gating in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology. In Imaging and Applied Optics Congress, paper CF4C.6. doi:10.1364/cosi.2020.cf4c.6

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Parallel Acquisition of Multiple Images Using Coherence Gating in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology

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Parallel Acquisition of Multiple Images Using Coherence Gating in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology

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