We present an Off-Axis dark-field digital holographic microscope capable of parallel acquisition of multiple holograms. With this microscope we aim to measure overlay (OV) with sub-nanometer precision and milli-second acquisition times over large wavelength range.

OSA Technical Digest (Optical Society of America)
Computational Imaging

Messinis, C., van Schaijk, T., Tenner, V., de Boer, J., Witte, S., & den Boef, A. (2020). Parallel Acquisition of Multiple Images Using Coherence Gating in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology. In Imaging and Applied Optics Congress, paper CF4C.6. doi:10.1364/cosi.2020.cf4c.6