We present a method to obtain the individual charge-state-dependent kinetic-energy distributions of tin ions emanating from a laser-produced plasma from their joint overlapping energy distributions measured by means of a retarding field energy analyzer (RFA). The method of extracting charge state specific parameters from the ion signals is described mathematically, and reinforced with experimental results. The absolute charge-state-resolved ion energy distributions is obtained from ns-pulse Nd:YAG-laser-produced microdroplet tin plasmas in a setting relevant for state-of-the-art extreme ultraviolet nanolithography

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Springer Science
NWO VIDI , ERC
doi.org/10.1007/s00340-022-07844-5
Appl. Phys. B: Lasers Opt.
EUV Plasma Processes

Poirier, L, Lassise, A, Mostafa, Y, Behnke, L, Braaksma, N, Assink, L, … Versolato, O.O. (2022). Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer. Appl. Phys. B: Lasers Opt., 128(7), 135: 1–135: 7. doi:10.1007/s00340-022-07844-5