2022-09-01
Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum
Publication
Publication
Surf. Coat. Technol. , Volume 445 p. 128729: 1- 9
Microscopy and diffraction measurements are presented of ultrathin binary alloy films of ruthenium and molybdenum that are obtained by standard sputter deposition. For compositions close to Ru50Mo50, we find the films to be amorphous. The amorphicity of the films is accompanied by a significant reduction of the roughness with respect to the roughness of equally thick films of either ruthenium or molybdenum. We ascribe this to the absence of the grain structure that is characteristic of the polycrystalline films of the separate elements.
| Additional Metadata | |
|---|---|
| , , , , , | |
| Elsevier BV | |
| ASML, ARCNL, VU, UvA, RUG, NWO | |
| doi.org/10.1016/j.surfcoat.2022.128729 | |
| Surf. Coat. Technol. | |
| Organisation | Nanolayers-Former Group |
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Yetik, G., Troglia, A., Farokhipoor, S., van Vliet, S., Momand, J., Kooi, B., … Frenken, J. (2022). Ultrathin, sputter-deposited, amorphous alloy films of ruthenium and molybdenum. Surf. Coat. Technol., 445, 128729: 1–9. doi:10.1016/j.surfcoat.2022.128729 |
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