We present simultaneous 1D imaging and broadband spectroscopy of a laser-produced plasma (LPP) source of extreme ultraviolet light, using a tapered zone plate that is matched to the dispersion of a transmission grating. We describe the design and fabrication of the zone plates in the 5–80 nm wavelength regime with designed spatial resolution of ∼10 µm and spectral resolution of ∼0.8 nm. Subsequently, we benchmark the imaging spectrometer with a solid tin target LPP. Plane wave propagation simulations qualitatively match the experimental results and confirm the device performance.

NWO VIDI , ERC , Dutch Ministry of Economic Affairs, TKI
Opt. Lett.
EUV Plasma Processes

Mostafa, Y., Bouza, Z., Byers, J., Babenko, I., Ubachs, W., Versolato, O., & Bayraktar, M. (2023). Extreme ultraviolet broadband imaging spectrometer using dispersion-matched zone plates. Opt. Lett., 48(16), 4316–4318. doi:10.1364/ol.496995