The cavitation-driven expansion dynamics of liquid tin microdroplets set in motion by the ablative impact of a 15-ps laser pulse is investigated. We combine high-resolution stroboscopic shadowgraphy with an intuitive fluid-dynamic model that includes the onset of fragmentation, and find good agreement between model and experimental data for two different droplet sizes over a wide range of laser pulse energies. The dependence of the initial expansion velocity on these experimental parameters is heuristically captured in a single power law. Further, the late-time mass distributions obtained are shown to be governed by a single parameter. These studies are performed under conditions relevant for plasma light sources for extreme-ultraviolet nanolithography.

APS
ASML, ARCNL, VU, UvA, NWO , NWO
doi.org/10.1103/PhysRevApplied.10.054005
Phys. Rev. Appl.
EUV Plasma Processes

Kurilovich, D, de Faria Pinto, T, Torretti, F, Schupp, R, Scheers, J, Stodolna, A, … Versolato, O.O. (2018). Expansion Dynamics after Laser-Induced Cavitation in Liquid Tin Microdroplets. Phys. Rev. Appl., 10(5), 054005: 1–054005: 8. doi:10.1103/PhysRevApplied.10.054005