2018-11-02
Expansion Dynamics after Laser-Induced Cavitation in Liquid Tin Microdroplets
Publication
Publication
Phys. Rev. Appl. , Volume 10 - Issue 5 p. 054005: 1- 8
The cavitation-driven expansion dynamics of liquid tin microdroplets set in motion by the ablative impact of a 15-ps laser pulse is investigated. We combine high-resolution stroboscopic shadowgraphy with an intuitive fluid-dynamic model that includes the onset of fragmentation, and find good agreement between model and experimental data for two different droplet sizes over a wide range of laser pulse energies. The dependence of the initial expansion velocity on these experimental parameters is heuristically captured in a single power law. Further, the late-time mass distributions obtained are shown to be governed by a single parameter. These studies are performed under conditions relevant for plasma light sources for extreme-ultraviolet nanolithography.
| Additional Metadata | |
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| ASML, ARCNL, VU, UvA, RUG, NWO , Netherlands Organisation for Scientific Research (NWO) | |
| APS | |
| doi.org/10.1103/PhysRevApplied.10.054005 | |
| Phys. Rev. Appl. | |
| Organisation | EUV Plasma Processes |
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Kurilovich, D., de Faria Pinto, T., Torretti, F., Schupp, R., Scheers, J., Stodolna, A., Gelderblom, H., Eikema, K., Witte, S., Ubachs, W., Hoekstra, R.& Versolato, O. (2018). Expansion Dynamics after Laser-Induced Cavitation in Liquid Tin Microdroplets. Phys. Rev. Appl., 10(5), 054005: 1–8.https://doi.org/10.1103/PhysRevApplied.10.054005 |
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