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L. Wu (Lianjia), M. Tiekink, A. Giuliani (Alexandre), L. Nahon (Laurent) and S. Castellanos Ortega (Sonia)

2019-01-07

Tuning photoionization mechanisms of molecular hybrid materials for EUV lithography applications

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J. Mater. Chem. C , Volume 7 - Issue 1 p. 33- 37

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Publisher Royal Society of Chemistry (RSC)
Funder Netherlands Organisation for Scientific Research (NWO) , European Research Council (ERC)
Persistent URL doi.org/10.1039/C8TC05273E
Journal J. Mater. Chem. C
Organisation EUV Photoresists-Former Group
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Wu, L., Tiekink, M., Giuliani, A., Nahon, L., & Castellanos Ortega, S. (2019). Tuning photoionization mechanisms of molecular hybrid materials for EUV lithography applications. J. Mater. Chem. C, 7(1), 33–37. doi:10.1039/C8TC05273E
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