2024-06-24
On the question whether surface roughness can explain the absence of a prominent single-collision peak in keV heavy-ion scattering off a polycrystalline Ru surface
Publication
Publication
Nucl. Instrum. Methods. Phys. Res., Sect B , Volume 554 p. 165442: 1- 6
In a joint experimental and modeling effort, we have studied 15 keV Ar, Kr, and Xe projectiles scattering off a polycrystalline Ru surface to assess the possible role of surface roughness in the apparent near-absence of the single-collision (SC) peak for Xe, the heaviest of the ions. The surface roughness of the Ru sample was determined by atomic force microscopy (AFM). The AFM image is used as input to simulations by means of the ray tracing code SPRAY. The observed spectra display a significant SC peak in the energy distributions of reflected Ar and Kr ions, which is not the case for Xe. The energy spectrum produced by the reflection of Xe and recoiled Ru ions closely corresponds to the results obtained from our SPRAY simulations. It is evident that surface roughness plays a crucial role in the visibility of the SC peak. From simulations for different target roughnesses, it is clear that a concentrated distribution of inclination angles centered around 2° effectively reduces the intensity of the single-collision peak for Xe ion scattering. The presence of a distinct SC peak for Ar and Kr ions, unlike Xe ions, supports the notion that the absence of a prominent SC peak in Xe ion scattering is not primarily due to geometric blocking of trajectories by surface roughness. This suggests that for slow, heavy ions like Xe, scattering effects arising from the nearest neighbors to the binary collision partner are significant and should be carefully examined.
Additional Metadata | |
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Elsevier BV | |
ASML, ARCNL, VU, UvA, RUG, NWO | |
doi.org/10.1016/j.nimb.2024.165442 | |
Nucl. Instrum. Methods. Phys. Res., Sect B | |
Organisation | EUV Plasma Processes |
Assink, L., Brötzner, J., Cupak, C., Salverda, M., Jonkman, H. T., Versolato, O., … Hoekstra, R. (2024). On the question whether surface roughness can explain the absence of a prominent single-collision peak in keV heavy-ion scattering off a polycrystalline Ru surface. Nucl. Instrum. Methods. Phys. Res., Sect B, 554, 165442: 1–6. doi:10.1016/j.nimb.2024.165442 |