2024-10-01
Spectral and spatial resolution of an extreme ultraviolet broadband imaging spectrometer based on dispersion-matched zone plates
Publication
Publication
AIP Advances , Volume 14 - Issue 10 p. 105021: 1- 7
We present a combined 1D imaging and broadband spectroscopy tool for analyzing laser-produced plasma sources of extreme ultraviolet light using a tapered zone plate that is dispersion-matched to a transmission grating. Specifically, we follow up on prior work [Mostafa et al. Opt. Lett. 48, 4316 (2023)] to obtain the actual spectral and spatial resolution of the imaging spectrometer and compare it to the design values. The imaging spectrometer is shown to have a spectral resolution of 1.2 nm at 13.5 nm, close to its design value, by assessing spectra obtained from carbon laser-produced plasma in a 5–180 nm wavelength band. The spatial resolution was obtained by placing slits near the object plane and back-illuminating the slit with a tin laser-produced plasma and found to be 17(5) µm, somewhat larger than the design specifications but still well within design limits for use for diagnosing plasma.
| Additional Metadata | |
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| AIP Publishing | |
| ASML, ARCNL, VU, UvA, RUG, NWO , Dutch Ministry of Economic Affairs, Toeslag voor Topconsortia voor Kennis en Innovatie (TKI) , ERC | |
| doi.org/10.1063/5.0226426 | |
| AIP Advances | |
| Organisation | EUV Plasma Processes |
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Babenko, I., Mostafa, Y., Bouza, Z., Versolato, O., & Bayraktar, M. (2024). Spectral and spatial resolution of an extreme ultraviolet broadband imaging spectrometer based on dispersion-matched zone plates. AIP Advances, 14(10), 105021: 1–7. doi:10.1063/5.0226426 |
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