Investigating Tin Vapor Broadening and Shifting Mechanisms for Gas Parameter Extraction Using UV Shadowgraphy

de Reus, Lars

This thesis investigates the broadening and shifting mechanisms of neutral tin absorption lines in the ultraviolet (UV) range and their applicability in determining key parameters for vapor targets relevant to extreme ultraviolet (EUV) lithography and fusion research.

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Thesis Advisor	O.O. Versolato (Oscar) , D.J. Engels (Dion)
Degree Grantor	Eindhoven University of Technology
Organisation	EUV Plasma Processes
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	de Reus, L. (2025, April 9). Investigating Tin Vapor Broadening and Shifting Mechanisms for Gas Parameter Extraction Using UV Shadowgraphy.

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Investigating Tin Vapor Broadening and Shifting Mechanisms for Gas Parameter Extraction Using UV Shadowgraphy

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Investigating Tin Vapor Broadening and Shifting Mechanisms for Gas Parameter Extraction Using UV Shadowgraphy

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