2026
Laser-induced plasma formation on free-flying liquid tin sheets
Publication
Publication
Phys. Plasmas , Volume 33 - Issue 1 p. 013507: 1- 9
We investigate the spatial and temporal dynamics of plasma formed on liquid tin sheets when irradiated with a 5 ns laser pulse at an intensity I of several 10 8 W/cm 2. From temporally integrated images of plasma emission, we deduce that there must be an intensity-specific minimum thickness at which plasma formation still occurs. Time-resolved detection of the laser light transmitted through and along the sheet reveals fast dynamics in the competition between vaporization and plasma formation. The overall dynamics are well captured in models that combine preexisting scaling laws for the time to full vaporization ( ) and the time to plasma onset ( ). These findings are particularly relevant for target preparation and metrology in plasma light sources utilizing tin targets to produce extreme ultraviolet light for nanolithography applications, including metrology.
| Additional Metadata | |
|---|---|
| AIP Publishing | |
| European Research Council (ERC) | |
| ASML, ARCNL, VU, UvA, RUG, NWO | |
| doi.org/10.1063/5.0307705 | |
| Phys. Plasmas | |
| Organisation | EUV Plasma Processes |
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Schubert, H. K., Meijer, R. A., Liu, B., Engels, D., & Versolato, O. (2026). Laser-induced plasma formation on free-flying liquid tin sheets. Phys. Plasmas, 33(1), 013507: 1–9. doi:10.1063/5.0307705 |
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