2019-12-19
Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography
Publication
Publication
This thesis aims to further the understanding of the Sn ions responsible for emis-sion of 13.5 nm radiation in laser-produced-plasma EUV sources for the nano-lithographic industry.
| Additional Metadata | |
|---|---|
| Promotor | W.M.G. Ubachs (Wim) , R. Hoekstra (Ronnie) , O.O. Versolato (Oscar) |
| Funder | NWO |
| Degree Grantor | VU University Amsterdam |
| Citation |
Torretti, F. (2019, December 19). Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography.
|
| Additional Files | |
|---|---|
| Cover-F.Torretti.png Cover Image , 66kb | |
