Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography

Torretti, Francesco

This thesis aims to further the understanding of the Sn ions responsible for emis-sion of 13.5 nm radiation in laser-produced-plasma EUV sources for the nano-lithographic industry.

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Promotor	W.M.G. Ubachs (Wim) , R. Hoekstra (Ronnie) , O.O. Versolato (Oscar)
Funder	NWO
Degree Grantor	VU University Amsterdam
Organisation	EUV Plasma Processes
Citation APA Style AAA Style APA Style Cell Style Chicago Style Harvard Style IEEE Style MLA Style Nature Style Vancouver Style American-Institute-of-Physics Style Council-of-Science-Editors Style BibTex Format Endnote Format RIS Format CSL Format DOIs only Format	Torretti, F. (2019, December 19). Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography.

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Spectroscopy of highly-charged Sn ions for extreme ultraviolet nanolithography

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