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J. Micro/Nanopattern. Mater. Metrol.

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ISSN: 2708-8340

Published by SPIE-Intl Soc Optical Eng

Previously known as "Journal of Micro/Nanolithography, MEMS, and MOEMS"

Diffraction-based overlay metrology from visible to infrared wavelengths using a single sensor Article

J. Micro/Nanopattern. Mater. Metrol., 21(1), 014001: 1-10.

T.T.M. van Schaijk (Theodorus), C. Messinis (Christos), N. Pandey (Nitesh), A. Koolen (Armand), S. Witte (Stefan), J.F. de Boer (Johannes) and A.J. den Boef (Arie)

February 2022
Illumination spot profile correction in digital holographic microscopy for overlay metrology Article

J. Micro/Nanopattern. Mater. Metrol., 22(2), 024001: 1-14.

M. Adhikary (Manashee), T. van Gardingen-Cromwijk (Tamar), de Wit (Jo), S. Witte (Stefan), J.F. de Boer (Johannes) and A.J. den Boef (Arie)

June 2023
Enhancing diffraction-based overlay metrology capabilities in digital holographic microscopy using model-based signal separation Article

J. Micro/Nanopattern. Mater. Metrol., 23(4), 044006: 1-14.

T. van Gardingen-Cromwijk (Tamar), S.G.J. Mathijssen (Simon), M. Noordam (Marc), S. Witte (Stefan), J.F. de Boer (Johannes) and A.J. den Boef (Arie)

November 2024

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