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Proc. SPIE 12053, Metrology, Inspection, and Process Control XXXVI, 1205305

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SPIE Advanced Lithography Exhibition

Published by SPIE-Intl Soc Optical Eng

Enhancement of acoustic-wave induced reflection changes through surface plasmon polaritons In Proceedings

T.J. van den Hooven (Thomas), G. de Haan (Guido) and P.C.M. Planken (Paul)

May 2022

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