The total electron-induced Secondary Electron Yield (SEY) of alkali-free glass has been determined by a novel technique which is solely based on the use of a collector electrode and of two interchangeable dielectric samples. The current from a charge-saturated sample provides a direct measure of the primary beam current. The SEY from the (uncharged) sample under investigation can then be determined simply as the ratio between the collector currents measured at the same electron energy from both samples. We further apply a low-current, short-pulse procedure to limit sample charging, needed to mitigate distortion of the SEY by charging effects. The potential build-up during the experiment could be reconstructed based on the primary electron currents and the measured SEY. This strategy permitted us to measure a 6-point SEY curve, without the need for intermediate discharging of the sample, as the total induced surface potential rise could be kept below +2.55 V.

Elsevier BV
Nucl. Instrum. Methods. Phys. Res., Sect B
Nanolayers-Former Group

van Eden, G., Verheijde, D., & Verhoeven, J. (2022). Secondary electron emission yield measurements of dielectrics based on a novel collector-only method. Nucl. Instrum. Methods. Phys. Res., Sect B, 511, 6–11. doi:10.1016/j.nimb.2021.11.004