2019-02-27
Mechanistic insights in Zr-, and Hf-based molecular hybrid EUV photoresists
Publication
Publication
J. of Micro/Nanolithography. MEMS and MOEMS , Volume 18 - Issue 1 p. 013504
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SPIE. | |
doi.org/10.1117/1.JMM.18.1.013504 | |
J. of Micro/Nanolithography. MEMS and MOEMS | |
Organisation | EUV Photoresists-Former Group |
Wu, L, Baliozovic, M, Portale, G, Kazazis, D, Vockenhuber, M, Jung, T, … Castellanos Ortega, S. (2019). Mechanistic insights in Zr-, and Hf-based molecular hybrid EUV photoresists. J. of Micro/Nanolithography. MEMS and MOEMS, 18(1). doi:10.1117/1.JMM.18.1.013504
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